Transmission box for reticle POD
US9097980B2 · kind B2 · utility
4Cited by
5References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 30, 2011 |
| Grant date | Aug 4, 2015 |
| Priority date | — |
| Expiry date | Jun 4, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/66
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A transmission box using AMHS for transferring reticle pod is provided, wherein an OHT (Overhead Hoist Transfer) system is disposed on the transmission box to perform mechanical transferring of the reticle pod for greatly reducing risks of damaging reticles caused by operators when transferring, streamlining the allocation of operators, and thus decreasing the time needed for process to complete.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.