Pixel drive circuit and preparation method therefor, and array substrate
US9099497B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 23, 2012 |
| Grant date | Aug 4, 2015 |
| Priority date | — |
| Expiry date | Nov 23, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/60
Abstract
The application discloses a pixel driving circuit and a fabrication method thereof as well as an array substrate, the pixel driving circuit including a switching and a driving TFT, the method including: on a substrate, fabricating a gate, a gate insulation GI layer, an oxide semiconductor layer, and an etching stop ESL layer simultaneously in turn; depositing simultaneously source/drain metals of the switching TFT and the driving TFT, the drain metal of the switching TFT extending and covering the GI layer on the gate of the driving TFT by etching; depositing a protection layer; etching off the protection layer, the drain metal of the switching TFT and the GI layer at a via hole by using a via hole process, to expose the gate of the driving TFT; depositing an ITO layer connecting the drain of the switching TFT and the gate of the driving TFT at the via hole.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.