Circuit for measuring the resonant frequency of nanoresonators

US9100025B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Patrick Villard · Grenoble, FR
• Gérard Billiot · Damiette, FR

Key dates

• Filing date: Apr 15, 2014
• Grant date: Aug 4, 2015
• Expiry date: Apr 15, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N29/22
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In the field of nanoresonator oscillators or NEMS (nanoelectromechanical systems) oscillators, a circuit is proposed for measuring the oscillation frequency of a resonator, including a phase-locked loop with a frequency-controlled oscillator and a phase comparator. The resonator includes a vibration excitation input and a dynamic polarization input (using strain gauges). The frequency-controlled oscillator applies a polarization frequency f1 to the polarization input. A frequency generator supplies a fixed intermediate frequency FI; a mixer receives the frequencies f1 and FI for producing an excitation frequency f0 that is the sum or difference of f1 and FI. The phase comparator receives the frequency FI and the output signal of the resonator and produces a control signal that is sent to the frequency-controlled oscillator, indirectly locking the oscillation frequency onto the resonant frequency of the resonator.