High-pressure washing liquid ejecting washing apparatus
US9101965B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 17, 2009 |
| Grant date | Aug 11, 2015 |
| Priority date | — |
| Expiry date | Jun 11, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67051
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A high-pressure washing liquid ejecting washing apparatus comprises a bar-shaped holder; and a plurality of high-pressure washing liquid ejecting nozzles arranged at constant intervals along a longitudinal direction of the bar-shaped holder, the holder being supported at both sides in a longitudinal direction thereof such that the holder is rotatable around its longitudinal axis, the holder being reciprocatingly rotated around the longitudinal axis within a predetermined rotational angle and the ejecting nozzles ejecting a high-pressure washing liquid to a washed surface of an object in a single straight-line shape to wash the object while the object is conveyed at a constant speed with respect to the holder, wherein the holder has a length which is not less than a length across the object and is disposed such that the holder is orthogonal to a direction in which the object is conveyed or is tilted with respect to the direction in which the object is conveyed, when viewed from a normal line direction of the washed surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.