Reel-to-reel reaction of precursor film to form solar cell absorber
US9103033B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 12, 2007 |
| Grant date | Aug 11, 2015 |
| Priority date | — |
| Expiry date | Oct 16, 2032 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/0623
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A roll-to-roll rapid thermal processing (RTP) tool with multiple chambers for forming a solar cell absorber by reacting a precursor layer on a continuous flexible workpiece. The RTP tool includes an elongated housing having a heating chamber with a predetermined temperature profile, a supply chamber and a receiving chamber. The heating chamber includes a small process gap in which the precursor layer is reacted with a Group VIA material to form an absorber layer. The continuous flexible workpiece is unrolled and advanced from the supply chamber into the heating chamber, and the processed continuous flexible workpiece is taken up and rolled in the receiving chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.