Capacitive pressure sensor with intrinsic temperature compensation
US9103738B2 · kind B2 · utility
1Cited by
73References
20Claims
0Family size
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Key dates
| Filing date | Sep 7, 2012 |
| Grant date | Aug 11, 2015 |
| Priority date | — |
| Expiry date | Apr 27, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49007
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Pressure sensors and their methods of use are described. In one embodiment, a pressure sensor includes a probe body and a capacitive sensor disposed at a distal end of the probe body. The capacitive sensor produces a sensing capacitance. The pressure sensor also includes a shunt capacitance. In the described pressure sensor, a change in the sensing capacitance due to dimensional changes associated with a temperature change is offset by a corresponding change in the shunt capacitance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.