Ion source having negatively biased extractor
US9105436B2 · kind B2 · utility
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12Claims
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Key dates
| Filing date | Mar 14, 2013 |
| Grant date | Aug 11, 2015 |
| Priority date | — |
| Expiry date | Oct 17, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H6/00
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of generating ions in a radiation generator includes emitting electrons from an active cathode and on a trajectory away from the active cathode, at least some of the electrons as they travel interacting with an ionizable gas to produce ions. The method also includes setting a potential of at least one extractor downstream of the active cathode such that the ions are attracted toward the at least one extractor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.