Patent · US Active

Integrated circuit including an environmental sensor

US9105479B2 · kind B2 · utility

14Cited by

1References

12Claims

0Family size

Assignee

AMS INTERNATIONAL AG · CH

Inventors

Willem Frederik Adrianus Besling · Eindhoven, NL
Martien Kengen · Boxmeer, NL

Key dates

Filing date	Sep 5, 2013
Grant date	Aug 11, 2015
Priority date	—
Expiry date	Sep 5, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/0002
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

An integrated circuit and a method of making the same. The integrated circuit includes a semiconductor substrate including at least one environmental sensor. The integrated circuit also includes a cap layer located on a major surface of the substrate. The integrated circuit further includes at least one elongate channel for allowing access of said sensor to an environment surrounding the integrated circuit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.