Stabilization structure including sacrificial release layer and staging bollards
US9105714B2 · kind B2 · utility
161Cited by
45References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 30, 2013 |
| Grant date | Aug 11, 2015 |
| Priority date | — |
| Expiry date | Apr 13, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H29/10
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method and structure for stabilizing an array of micro devices is disclosed. The array of micro devices is within an array of staging cavities on a carrier substrate. Each micro device is laterally retained between a plurality of staging bollards of a corresponding staging cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.