Patent · US Active

Device for noncontact determination of edge profile at a thin disk-shaped object

US9106807B2 · kind B2 · utility

1Cited by

1References

10Claims

0Family size

Assignee

KoCoS Automation GmbH · DE

Inventors

Axel Gaglin · Jena, DE
Thomas W. Becker · Cupertino, US
Frank Richter · Frankfurt, DE
Bernd Gey · Hermsdorf, DE

Key dates

Filing date	Feb 4, 2013
Grant date	Aug 11, 2015
Priority date	—
Expiry date	Feb 22, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01N21/956
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A device for noncontact determination of the edge profile at a thin disk-shaped object helps determining the edge profile at semiconductor wafers in which exact image recording is not impaired by specular reflections of the edge profile. A plurality of light sources in the form of laser radiation sources each emitting a line-shaped light bundle are arranged so as to be coplanar in a common plane representing a measurement plane oriented orthogonal to a base plane of the object and are directed from different directions to a common intersection of the laser radiation sources in the edge region of the object. A light sheet is formed in the measurement plane and at least one base camera is directed in the base plane lateral to the measurement plane to capture scattered light proceeding from a light line generated by the light sheet when impinging the object edge region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.