MEMS utility meters with integrated mass flow sensors
US9109935B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 28, 2012 |
| Grant date | Aug 18, 2015 |
| Priority date | — |
| Expiry date | Oct 28, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F25/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention is related to an apparatus which incorporates a microfabricated silicon mass flow sensor to measure city gas flow rate in a medium pressure range for utility industry which is dominated by conventional mechanical meters such as turbine and rotary meters. The microfabricated mass flow sensor is so called micro-electro-mechanical systems (a.k.a. MEMS) device. Due to the small feature size of micro scale for MEMS mass flow sensor, the invented apparatus includes many advantages such as low power consumption, compact package, high reliability and extended dynamic measurement range. This apparatus is also provided with a stable flow conditioning to achieve a desired dynamic range capability. Furthermore, because of the high accuracy characteristic, the apparatus in this invention could be applied for custody transfer or tariff in utility industry as well.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.