Piezoresistive micromechanical sensor component and corresponding measuring method

US9110090B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Reinhard Neul · Stuttgart, DE
• Christian Rettig · Reutlingen, DE
• Achim Trautmann · Leonberg, DE
• Daniel Christoph Meisel · Pittsburgh, US
• Alexander Buhmann · Reutlingen, DE
• Manuel Engesser · Laufenburg (Baden), DE
• Ando Feyh · Palo Alto, US

Key dates

• Filing date: Jan 19, 2011
• Grant date: Aug 18, 2015
• Expiry date: Jan 14, 2032

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P15/123
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A piezoresistive micromechanical sensor component includes a substrate, a seismic mass, at least one piezoresistive bar, and a measuring device. The seismic mass is suspended from the substrate such that it can be deflected. The at least one piezoresistive bar is provided between the substrate and the seismic mass and is subject to a change in resistance when the seismic mass is deflected. The at least one piezoresistive bar has a lateral and/or upper and/or lower conductor track which at least partially covers the piezoresistive bar and extends into the region of the substrate. The measuring device is electrically connected to the substrate and to the conductor track and is configured to measure the change in resistance over a circuit path which runs from the substrate through the piezoresistive bar and from the piezoresistive bar through the lateral and/or upper and/or lower conductor track.