Ion source including a filter electrode
US9111713B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 28, 2012 |
| Grant date | Aug 18, 2015 |
| Priority date | — |
| Expiry date | Aug 28, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/164
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Provide an ion source for outputting ion beam with high purity of polyvalent positive ion.The ion source 10 includes: a target 12 from which electron and positive ion are generated by plasma formed by laser 13 irradiation; a first power supply source (first voltage E1) that sets an electric potential of the target 12 higher than that of a destination of the positive ion (corresponding to an acceleration channel 18 in FIG. 1); and a second power supply source (second voltage E1) that sets an electric potential of on a pass (corresponding to a filter electrode 15 in FIG. 1) from the target 12 to the destination 18 higher than that of the target 12.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.