Device and use of the device for measuring the density and/or the electron temperature and/or the collision frequency of a plasma

US9113543B2 · kind B2 · utility

Assignee

• RUHR-UNIVERSITÄT BOCHUM · DE

Inventors

• Ralf Brinkmann · Grevenbroich, DE
• Jens Oberrath · Bochum, DE
• Peter Awakowicz · Munich, DE
• Martin Lapke · Hamburg, DE
• Thomas Musch · Neheim, DE
• Thomas Mussenbrock · Wuppertal, DE
• Ilona Rolfes · Bochum, DE
• Christian Schulz · Duisburg, DE
• Robert Storch · Lüdenscheid, DE
• Tim Styrnoll · Bochum, DE
• Christian Zietz · Lippstadt, DE

Key dates

• Filing date: Oct 6, 2011
• Grant date: Aug 18, 2015
• Expiry date: Apr 13, 2032

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05H1/0081
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

The invention relates to a device and method for measuring the density of a plasma by determining an impulse response to a high-frequency signal coupled into a plasma. The density, electron temperature and/or collision frequency as a function of the impulse response can be determined. A probe having a probe head and a probe shaft can be introduced into the plasma, wherein the probe shaft is connected to a signal generator for electrically coupling a high-frequency signal into the probe head. The probe core is enclosed by the jacket and has at its surface mutually insulated electrode areas of opposite polarity. A balun is arranged at the transition between the probe head and an electrically unbalanced high-frequency signal feed to convert electrically unbalanced signals into balanced signals.