Patent · US Active

Ozone generation system

US9114987B2 · kind B2 · utility

0Cited by
7References
6Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 30, 2012
Grant dateAug 25, 2015
Priority date
Expiry dateAug 30, 2032

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC01B2201/90
  • WIPO fieldMaterials, metallurgy
  • WIPO sectorChemistry

Abstract

In the present invention, a gas flow rate adjustment apparatus that outputs a raw material gas to an ozone generation apparatus is provided. The gas flow rate adjustment apparatus includes a plurality of flow rate adjustment parts, and outputs a second mixed gas serving as the raw material gas to the ozone generation apparatus. The second mixed gas includes an oxygen gas outputted from a first oxygen flow rate adjustment part and a first mixed gas outputted from a mixed gas flow rate adjustment part. The raw material gas generated by the gas flow rate adjustment apparatus, which includes an oxygen gas and a nitrogen gas, contains the nitrogen gas added to the oxygen gas with the rate of addition being in a range of more than 0 PPM and not more than 100 PPM.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.