Production of polycrystalline silicon by the thermal decomposition of silane in a fluidized bed reactor
US9114997B2 · kind B2 · utility
2Cited by
15References
49Claims
0Family size
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Key dates
| Filing date | Sep 27, 2012 |
| Grant date | Aug 25, 2015 |
| Priority date | — |
| Expiry date | Feb 18, 2033 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF23G2209/142
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Processes for producing polycrystalline silicon by thermal decomposition of silane are disclosed. The processes generally involve thermal decomposition of silane in a fluidized bed reactor operated at reaction conditions that result in a high rate of productivity relative to conventional production processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.