Low drift scanning probe microscope
US9116168B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 21, 2014 |
| Grant date | Aug 25, 2015 |
| Priority date | — |
| Expiry date | Oct 21, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning probe microscope, such as an atomic force microscope, and method including z-stage and a bridge structure. A scanner containing a probe is mounted to the z-stage, which is movable in the z-axis to raise and lower the probe. The method reduces thermal drift of the z-stage and the bridge using a combination of heating elements thermally coupled to the z-stage and the bridge, ambient temperature sensors, and a controller to actively control the heating elements to maintain the bridge and the z-stage at an elevated temperature. Ideally, the temperatures in the system are selected so as to reduce drift between the probe and the sample during AFM scanning, wherein the drift is preferably maintained at less than about 1 nm for an ambient temperature change of about 1° C.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.