Calibratable magnetic field sensor and method of producing same

US9116192B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Markus Stahl-Offergeld · Erlangen, DE
• Roland Ernst · Erlangen, DE
• Hans-Peter Hohe · Heiligenstadt, DE

Key dates

• Filing date: Feb 17, 2012
• Grant date: Aug 25, 2015
• Expiry date: Oct 1, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R33/077
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Magnetic field sensor having a vertical Hall sensor element arranged in a semiconductor substrate, and an exciting conductor arrangement having at least one exciting conductor, the exciting conductor being arranged within an exciting conductor plane which is spaced apart, in parallel to the substrate surface, from the vertical Hall sensor element at a vertical distance h1 having a tolerance range Δh1 which is due to the manufacturing process, and which exciting conductor further has a lateral distance d1 as an offset from a center position which is located, in relation to the substrate surface, perpendicularly to the vertical Hall sensor element, and the lateral distance d1 being dimensioned such that a vertical calibration component B1x of a magnetic flux density B1 created by the exciting conductor arrangement in the vertical Hall sensor element changes by less than 5% within the tolerance range Δh1 for the vertical distance h1.