Hologram with cells to control phase in two polarization directions and exposure apparatus
US9116303B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 5, 2010 |
| Grant date | Aug 25, 2015 |
| Priority date | — |
| Expiry date | Jun 30, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70566
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides a hologram which forms a light intensity distribution on a predetermined plane by using incident light. The hologram includes a plurality of cells configured to control both a phase of a first polarized light component in a first polarization direction of the incident light and a phase of a second polarized light component in a second polarization direction perpendicular to the first polarization direction, to form a phase difference distribution between phase distributions for the first and second polarized light components. The plurality of cells are designed so that a number of phase difference levels of the phase difference distribution is less than a number of phase levels of the phase distribution of the first polarized light component.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.