MEMS anchors
US9116344B2 · kind B2 · utility
6Cited by
461References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 26, 2013 |
| Grant date | Aug 25, 2015 |
| Priority date | — |
| Expiry date | Nov 26, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0307
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The invention relates to an improved apparatus and method for the design and manufacture of MEMS anchoring structures for light modulators in order to address the stresses of beams mounted on them.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.