Optical module for guiding a radiation beam

US9116440B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Markus Hauf · Ulm, DE
• Severin Waldis · Aalen, DE
• Wilfried Noell · Neuchâtel, CH
• Yves Petremend · Yverdon-les-Bains, CH
• Marco Jassmann · Neresheim, DE
• Lothar Kulzer · Adlersberg, DE
• Caglar Ataman · Freiburg (Elbe), DE

Key dates

• Filing date: Apr 2, 2014
• Grant date: Aug 25, 2015
• Expiry date: Apr 2, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70891
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical module includes a chamber capable of being evacuated and a mirror in the chamber. The mirror includes a plurality of individual mirrors. Each individual mirror includes: a mirror body including a reflection face; a support structure; and a thermally conductive portion that mechanically connects the support structure to the mirror body. For at least one individual mirror, the thermally conductive portion includes a plurality of thermally conductive strips arranged radially, adjacent thermally conductive strips being separated from each other, and each of the plurality of thermally conductive strips connecting the mirror body to the support structure. For at least one individual mirror, an actuator is associated with the mirror body, the actuator being configured to displace the mirror body relative to the support structure in at least one degree of freedom.