Patent · US Active

Demodulation pixel with backside illumination and charge barrier

US9117712B1 · kind B1 · utility

26Cited by
9References
10Claims
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Assignee

Inventors

Key dates

Filing dateJul 26, 2010
Grant dateAug 25, 2015
Priority date
Expiry dateMay 7, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10F39/807

Abstract

A high-speed, high-sensitivity demodulation sensor usable for e.g. time-of-flight application uses a back side illuminated (BSI) image sensor chip, in which the photo-generated charges are first transferred to a demodulation area, from which the charges are then sampled and stored on at least one specific storage node. The storage node is electrically isolated from the sensitive area. Such a pixel might find its use specifically in 3D time-of-flight imaging given its improvements in sensitivity because the presented invention allows to design pixel with up to 100% fill factor and enables charge detection even if the charge generation by the photon occurs deep in the silicon substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.