3D nano-electro-mechanical multiple-state carbon nanotube device structures and methods of fabrication
US9117889B2 · kind B2 · utility
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Key dates
| Filing date | Jan 14, 2013 |
| Grant date | Aug 25, 2015 |
| Priority date | — |
| Expiry date | Jan 14, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D62/121
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A 3D M-CNT structure with at least one tri-state CNT NEM switch comprising at least an electrode as a source, an electrode as a gate and an electrode as a drain, a conductive carbon nanotube which is able to take three positions depending on a voltage application to said electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.