Electromechanical devices and methods for fabrication of the same

US9117934B2 · kind B2 · utility

Assignee

• The Trustees of Columbia University in the City of New York · US

Inventors

• Sami Rosenblatt · White Plains, US
• James Hone · New York, US
• Changyao Chen · New York, US

Key dates

• Filing date: May 31, 2011
• Grant date: Aug 25, 2015
• Expiry date: Nov 12, 2033

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10K85/20
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A fabricated electromechanical device is disclosed herein. An exemplary device includes, a substrate, at least one layer of a high-transconductance material separated from the substrate by a dielectric medium, a first electrode in electrical contact with the at least one layer of a high-transconductance material and separated from the substrate by at least one first supporting member, a second electrode in electrical contact with the layer of a high-transconductance material and separated from the substrate by at least one second supporting member, where the first electrode is electrically separate from the second electrode, and a third electrode separated from the at least one layer of high-transconductance material by a dielectric medium and separated from each of the first electrode and the second electrode by a dielectric medium.