Patent · US Active

Preparation of semiconductor films

US9117964B2 · kind B2 · utility

2Cited by

3References

13Claims

0Family size

Assignee

Merck Patent GmbH · DE

Inventors

Ranjan Deepak Deshmukh · Watertown, US
Ralf Kuegler · Cambridge, US
Joerg J. Schneider · Seeheim-Jugenheim, DE
Rudolf Hoffmann · Monroe, US

Key dates

Filing date	May 31, 2011
Grant date	Aug 25, 2015
Priority date	—
Expiry date	Sep 26, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02P70/50
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

The invention relates to a preparation process for thin semiconducting inorganic films comprising various metals (Cu/In/Zn/Ga/Sn), selenium and/or sulfur. The process uses molecular precursors comprising metal complexes with oximato ligands. Copper-based chalcopyrites of the I-III-IV2-type are prepared with high purity at low temperatures under ambient conditions. The thin films can be used in photovoltaic panels (solar cells).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.