Process for preparing ceramics, ceramics thus obtained and uses thereof, especially as a sputtering target
US9120708B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | May 17, 2007 |
| Grant date | Sep 1, 2015 |
| Priority date | — |
| Expiry date | Jan 27, 2031 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2235/77
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Process for preparing a ceramic from an inorganic base material that is in the form of a powder having a high melting point, comprising a step of mixing the powder of the inorganic base material with a second inorganic component also in powder form and which acts as a dopant for the inorganic base material. The dopant is constituted by a single inorganic material or by a mixture of at least two inorganic materials having a dopant effect on the inorganic base material. The process comprises a sintering step carried out at a high temperature. The ceramics obtained, because of their high density, are advantageously used as a target element. Films and electrodes obtained from these ceramics exhibit particularly advantageous properties.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.