Method for purifying chlorosilanes
US9126838B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 2, 2011 |
| Grant date | Sep 8, 2015 |
| Priority date | — |
| Expiry date | Feb 12, 2032 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B33/10778
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
The method comprises at least three steps of a hydrogenation step (101) and/or a chlorination step (102), an impurity conversion step (103), and a purification step (104). In the impurity conversion step (103), an aldehyde compound represented by the general formula Ar—R—CHO (Ar; denotes a substituted or unsubstituted aryl group, R; denotes an organic group having two or more carbon atoms) is added to convert donor impurities and acceptor impurities contained in a chlorosilane distillate to a high-boiling substance. The chlorosilane distillate after the donor impurities and acceptor impurities have been converted to a high-boiling substance is sent to the purification step (104). In the purification step (104), high purity chlorosilanes from which the donor impurities and acceptor impurities have been thoroughly removed are obtained by using a distillation column or the like, where the high purity chlorosilanes are recovered outside the system from the top of the column.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.