Etchant and method for manufacturing display device using the same
US9127368B2 · kind B2 · utility
2Cited by
2References
18Claims
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Key dates
| Filing date | Jun 30, 2014 |
| Grant date | Sep 8, 2015 |
| Priority date | — |
| Expiry date | Jun 30, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/60
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
An etchant includes, based on a total amount of the etchant, from about 0.5 to about 20 wt % of a persulfate, from about 0.01 to about 2 wt % of a fluorine compound, from about 1 to about 10 wt % of an inorganic acid, from about 0.5 to about 5 wt % of an azole compound, from about 0.1 to about 5 wt % of an electron-donating compound, from about 0.1 to about 5 wt % of a chlorine compound, from about 0.05 to about 3 wt % of a copper salt, from about 0.1 to about 10 wt % of an organic acid or an organic acid salt, and a remaining amount of water.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.