Chemical sensors with consistent sensor surface areas
US9128044B2 · kind B2 · utility
4Cited by
284References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 5, 2014 |
| Grant date | Sep 8, 2015 |
| Priority date | — |
| Expiry date | Mar 5, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/4145
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A material defines an opening extending to the upper surface of the floating gate conductor. The material comprises a first dielectric underlying a second dielectric. A conductive element contacts the upper surface of the floating gate conductor and extends a distance along a sidewall of the opening, the distance defined by a thickness of the first dielectric.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.