Ion source having negatively biased extractor
US9129770B2 · kind B2 · utility
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16Claims
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Assignee
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Key dates
| Filing date | Mar 14, 2013 |
| Grant date | Sep 8, 2015 |
| Priority date | — |
| Expiry date | Sep 26, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J27/16
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An ion source for use in a radiation generator includes a sealed envelope containing an ionizable gas therein. The ion source also includes a RF antenna external to the sealed envelope, the RF antenna to transmit time-varying electromagnetic fields within the sealed envelope for producing ions from the ionizable gas. There is at least one extractor within the sealed envelope having a potential such that the ions are attracted toward the at least one extractor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.