Patent · US Active

Process for plasma treatment employing ceramic-filled polyamideimide composite parts

US9129795B2 · kind B2 · utility

1Cited by

10References

6Claims

0Family size

Assignee

QUADRANT EPP AG · CH

Inventors

Scott Howard Williams · Pleasanton, US
Richard W. Campbell · Reinholds, US
Stephan Glander · Wettswil, CH

Key dates

Filing date	Apr 11, 2011
Grant date	Sep 8, 2015
Priority date	—
Expiry date	Jun 11, 2034

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC08G2650/40
WIPO fieldMacromolecular chemistry, polymers
WIPO sectorChemistry

Abstract

Internal components of plasma reactors are composed of a toleratable, ceramic filled plasma-useful polymer such as a high temperature engineering thermoplastic, preferably a polyamideimide. The parts exhibit a low erosion rate upon exposure to plasma at low pressure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.