Patent · US Active

Label sheet for cleaning and conveying member having cleaning function

US9131829B2 · kind B2 · utility

7Cited by
32References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 30, 2014
Grant dateSep 15, 2015
Priority date
Expiry dateJun 30, 2034

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/24752
  • WIPO fieldChemical engineering
  • WIPO sectorChemistry

Abstract

A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.