Label sheet for cleaning and conveying member having cleaning function
US9131829B2 · kind B2 · utility
7Cited by
32References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 30, 2014 |
| Grant date | Sep 15, 2015 |
| Priority date | — |
| Expiry date | Jun 30, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24752
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.