Patent · US Active

Apparatus and method for deposition for organic films

US9132447B2 · kind B2 · utility

3Cited by
2References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 17, 2013
Grant dateSep 15, 2015
Priority date—
Expiry dateJun 11, 2033

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB05D7/56
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

The invention provides apparatus and methods for organic continuum vapor deposition of organic materials on large area substrates.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.