Zinc oxide film-forming composition, zinc oxide film production method, and zinc compound
US9133349B2 · kind B2 · utility
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6Claims
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Key dates
| Filing date | Aug 7, 2013 |
| Grant date | Sep 15, 2015 |
| Priority date | — |
| Expiry date | Aug 7, 2033 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C18/42
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Disclosed are a composition for forming a zinc oxide-based film, said composition containing, as an essential component, a zinc compound represented by the following formula (1):wherein R1 and R2 mutually independently represent an alkyl group having 1 to 4 carbon atoms, a process for producing the zinc oxide-based film, and the zinc compound. The composition makes it possible to form a high-quality zinc oxide-based film, which has transparency, homogeneity and electrical conductivity, at a low temperature of 300° C. or lower.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.