Position sensor
US9134384B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 18, 2013 |
| Grant date | Sep 15, 2015 |
| Priority date | — |
| Expiry date | Jan 16, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/147
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Position sensor (10) for determining a linear position in a sensing direction, e.g. for application in a vacuum actuator. The position sensor (10) has a first sensor part and a second sensor part moveable with respect to each other. The first sensor part comprises an annular magnet (2) and a magnetic field sensor (3) positioned at a first distance (11) from the annular magnet on the magnet axis (1a). The second sensor part comprises a flux shaper (1) moveable through the annular magnet (2) along the sensing direction between a first and a second position, in the first position the flux shaper being substantially at the first distance (11) from the magnetic field sensor (3). The flux shaper is arranged to influence the magnetic field in a space between the annular magnet (2) and the magnetic field sensor (3).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.