Alumina sintered body, member including the same, and semiconductor manufacturing apparatus
US9136031B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 23, 2013 |
| Grant date | Sep 15, 2015 |
| Priority date | — |
| Expiry date | Oct 12, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An alumina sintered body contains alumina as a main component and titanium. The alumina sintered body further contains at least one element selected from the group consisting of lanthanum, neodymium, and cerium. Aluminum is contained in the alumina sintered body in an amount such that a ratio of aluminum oxide to total oxides in the alumina sintered body becomes 93.00 to 99.85% by weight where the total oxides are defined as a total amount of all oxides contained in the alumina sintered body. Titanium is contained in an amount such that a ratio of titanium oxide to the total oxides becomes 0.10 to 2.00% by weight. Lanthanum, neodymium, and cerium are contained in a combined amount such that a ratio of the combined amount to the total oxides becomes 0.05 to 5.00% by weight. Volume resistivity is 1×105 to 1×1012 Ω·cm at room temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.