Stacked acoustic resonator comprising a bridge
US9136818B2 · kind B2 · utility
7Cited by
342References
62Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 29, 2011 |
| Grant date | Sep 15, 2015 |
| Priority date | — |
| Expiry date | Jul 3, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/585
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
In accordance with a representative embodiment, a bulk acoustic wave (BAW) resonator structure, comprises: a first electrode disposed over a substrate; a first piezoelectric layer disposed over the first electrode; a second electrode disposed over the first piezoelectric layer; a second piezoelectric layer disposed over the second electrode; a third electrode disposed over the second piezoelectric layer; and a bridge disposed between the first electrode and the third electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.