Microfluidic devices for the generation of nano-vapor bubbles and their methods of manufacture and use
US9139416B2 · kind B2 · utility
3Cited by
1References
17Claims
0Family size
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Key dates
| Filing date | Mar 14, 2013 |
| Grant date | Sep 22, 2015 |
| Priority date | — |
| Expiry date | Apr 25, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24496
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Microfluidic devices having superhydrophilic bi-porous interfaces are provided, along with their methods of formation. The device can include a substrate defining a microchannel formed between a pair of side walls and a bottom surface and a plurality of nanowires extending from each of the side walls and the bottom surface. For example, the nanowires can be silicon nanowires (e.g., pure silicon, silicon oxide, silicon carbide, etc., or mixtures thereof).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.