Quartz glass crucible and method for treating surface of quartz glass crucible
US9139932B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Sep 7, 2007 |
| Grant date | Sep 22, 2015 |
| Priority date | — |
| Expiry date | Mar 30, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31612
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
There is provided a quartz glass article having a surface treated with novel coating materials which provides a reduced chemistry, wherein the quartz glass surface having a reduced chemistry upon exposure to melted silicon or similarly corrosive environments, forms crystalline structures covering at least 30% of the coated surface of the quartz glass crucible. Said crystalline covered surface provides a more stable surface of contact with the silicon melt and the growth of single crystal silicon. In one embodiment of the invention, the coating material comprises at least a methyl group for providing at least one of a hydrogenated and a methylated surface on the coated surface, forming rosette structures, or other crystalline morphologies covering at last 80% of the coated surface. In another embodiment of the invention, the coating material is selected from at least one of an amine, an organosilane halogen and mixtures thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.