Patent · US Active

MEMS hinges with enhanced rotatability

US9140042B2 · kind B2 · utility

11Cited by

5References

19Claims

0Family size

Inventors

Raviv Erlich · Rehovot, IL
Yuval Gerson · Even Yehuda, IL

Key dates

Filing date	Mar 13, 2014
Grant date	Sep 22, 2015
Priority date	—
Expiry date	Mar 13, 2034

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/25
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A mechanical device includes a long, narrow element made of a rigid, elastic material. A rigid frame is configured to anchor at least one end of the element, which is attached to the frame, and to define a gap running longitudinally along the element between the beam and the frame, so that the element is free to move within the gap. A solid filler material, different from the rigid, elastic material, fills at least a part of the gap between the element and the frame so as to permit a first mode of movement of the element within the gap while inhibiting a different, second mode of movement.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.