Piezoelectric vacuum gauge and measuring method thereof
US9140619B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2012 |
| Grant date | Sep 22, 2015 |
| Priority date | — |
| Expiry date | Jun 28, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0022
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A piezoelectric vacuum gauge includes an actuator with a flexible portion, an actuating unit, a sensor unit, a signal input terminal and a signal output terminal, and a fixture unit having a base portion and a cover portion. An external signal is generated by a signal generator. Receive and transmit an external signal to an actuating unit by the signal input terminal so that the actuating unit has a vibration. Prompt a flexible portion by the actuating unit to produce a first resonant motion when the actuating unit having the vibration. The first resonant motion converts into a second resonant motion because the flexible portion is subject to a damping force of ambient air. Prompt a sensor unit by the second resonant motion to cause a shape transformation of the sensor unit to generate a detecting signal. Output the detecting signal to an external instrument by a signal output terminal of sensor unit to calculate a vacuum pressure value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.