Liquid precursor for deposition of indium selenide and method of preparing the same
US9142408B2 · kind B2 · utility
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114References
17Claims
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Key dates
| Filing date | Aug 16, 2011 |
| Grant date | Sep 22, 2015 |
| Priority date | — |
| Expiry date | May 13, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/541
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Liquid precursors containing indium and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and method of depositing a liquid precursor on a substrate are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.