Storage device for multilayer substrate
US9144901B2 · kind B2 · utility
9Cited by
10References
8Claims
0Family size
Inventors
Key dates
| Filing date | Aug 27, 2012 |
| Grant date | Sep 29, 2015 |
| Priority date | — |
| Expiry date | Oct 22, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67751
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A storage device for a multilayer substrate comprises a base, a support and multiple brackets. The brackets are stacked along the support and are slidably attached to the support. The storage device for the multilayer substrate further comprises a bracket moving device, and the bracket moving device drives one or more the brackets to move up and down along the support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.