Patent · US Active

In-plane piezoresistive detection sensor

US9146252B2 · kind B2 · utility

2Cited by

4References

22Claims

0Family size

Assignee

Comissariat a l'Energie Atomique et aux Energies Alternatives · FR

Inventors

Philippe Robert · Grenoble, FR
Sebastien Hentz · Grenoble, FR

Key dates

Filing date	Oct 20, 2010
Grant date	Sep 29, 2015
Priority date	—
Expiry date	Dec 4, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0817
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An in-plane MEMS or NEMS detection device for measuring displacements directed along a direction including a seismic mass suspended with respect to a substrate, the seismic mass being pivotable about an axis perpendicular to the plane of the substrate, at least one piezoresistive strain gauge mechanically connected to the seismic mass and the substrate, wherein the piezoresistive gauge has a thickness lower than that of the seismic mass, and wherein the axis of the piezoresistive strain gauge is orthogonal to the plane containing the pivot axis and the center of gravity of the seismic mass and the plane is orthogonal to the direction of the displacements to be measured.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.