Patent · US Active

Manufacturing methods for semiconductor devices

US9147582B2 · kind B2 · utility

1Cited by
9References
27Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 19, 2011
Grant dateSep 29, 2015
Priority date
Expiry dateFeb 24, 2034

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02P70/50
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method of manufacturing semiconductor assemblies is provided. The manufacturing method includes thermally processing a first semiconductor assembly comprising a first semiconductor layer disposed on a first support and thermally processing a second semiconductor assembly comprising a second semiconductor layer disposed on a second support. The first and second semiconductor assemblies are thermally processed simultaneously, and the first and second semiconductor assemblies are arranged such that the first semiconductor layer faces the second semiconductor layer during the thermal processing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.