Method for verifying the alignment between integrated electronic devices

US9147636B2 · kind B2 · utility

Assignee

• STMicroelectronics SA

Inventors

• Roberto Canegallo · Rimini, IT
• Mauro Scandiuzzo · Pessano, IT
• Eleonora Franchi Scarselli · Bologna, IT
• Antonio Gnudi · Bologna, IT
• Roberto Guerrieri · Bologna, IT

Key dates

• Filing date: Nov 14, 2011
• Grant date: Sep 29, 2015
• Expiry date: Jul 30, 2034

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/0002
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A method includes communicatively coupling first and second integrated electronic devices together through a plurality of reference capacitors, transmitting a plurality of transmission reference signals on transmission reference electrodes of the plurality of reference capacitors, receiving coupling signals on reception reference electrodes of the plurality of reference capacitors, amplifying said coupling signals, generating a plurality of reception reference signals, generating a plurality of reception control signals as a function of the plurality of reception reference signals, and detecting a possible misalignment between said first and second integrated electronic devices based on the plurality of reception control signals.