Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and inkjet printer device
US9147827B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 28, 2012 |
| Grant date | Sep 29, 2015 |
| Priority date | — |
| Expiry date | Jun 3, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5607
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An object is to reduce the leakage current of a piezoelectric element including a potassium-sodium niobate thin film, enhance the reliability of the piezoelectric element and, in addition, enhance the withstand voltage by including a pair of electrodes and a piezoelectric layer sandwiched between the above-described pair of electrode layers, wherein the above-described piezoelectric layer is provided with at least one layer each of first piezoelectric layer which is a potassium-sodium niobate thin film substantially not containing Mn (manganese) and second piezoelectric layer which is a potassium-sodium niobate thin film containing Mn.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.