Coupled resonator filter comprising a bridge and frame elements
US9148117B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 24, 2011 |
| Grant date | Sep 29, 2015 |
| Priority date | — |
| Expiry date | Feb 16, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/02007
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
In accordance with a representative embodiment, a bulk acoustic wave (BAW) resonator structure, comprises: a first BAW resonator comprising a first lower electrode, a first upper electrode and a first piezoelectric layer disposed between the first lower electrode and the first upper electrode; a second BAW resonator comprising a second lower electrode, a second upper electrode and a second piezoelectric layer disposed between the second lower electrode and the second upper electrode; an acoustic coupling layer disposed between the first BAW resonator and the second BAW resonator; and a bridge disposed between the first lower electrode of the first BAW resonator and the second upper electrode of the second BAW resonator. An inner raised region or an outer raised region, or both are disposed over the second upper electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.