Coatings for relatively movable surfaces
US9150410B2 · kind B2 · utility
1Cited by
5References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 17, 2014 |
| Grant date | Oct 6, 2015 |
| Priority date | — |
| Expiry date | Jul 17, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S257/914
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A device has a microelectromechanical system (MEMS) component with at least one surface and a coating disposed on at least a portion of the surface. The coating has a compound of the formula M(CnF2n+1Or), wherein M is a polar head group and wherein n≧2r. The value of n may range from 2 to about 20, and the value of r may range from 1 to about 10. The value of n plus r may range from 3 to about 30, and a ratio of n:r may have a value of about 2:1 to about 20:1.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.