Patent · US Active

System and method for positioning a processing tool in relation to a workpiece

US9151593B2 · kind B2 · utility

1Cited by

4References

7Claims

0Family size

Assignee

DR. JOHANNES HEIDENHAIN GMBH · DE

Inventors

Wolfgang Holzapfel · Obing, DE
Joerg Drescher · Riedering, DE
Markus Meissner · Teupitz, DE
Ralph Joerger · Traunstein, DE
Bernhard Musch · Otterfing, DE
Thomas Kaelberer · Schrobenhausen, DE

Key dates

Filing date	Feb 19, 2013
Grant date	Oct 6, 2015
Priority date	—
Expiry date	Nov 10, 2033

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/54
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

In a system and a method for positioning a processing tool in relation to a workpiece, an object alignment mark and the workpiece are situated on a first object. In addition, a workpiece alignment mark is situated on the workpiece. The processing tool via which the object alignment mark is detectable is situated on a second object, which is disposed so as to be displaceable along at least one movement direction in relation to the first object. Furthermore, an alignment sensor is disposed thereon, with whose aid the object alignment mark and the workpiece alignment mark are detectable. In addition, a scannable measuring standard, which extends along the at least one movement direction, is disposed on the second object. At least two scanning units for scanning the measuring standard are situated on the first object in order to thereby determine the relative position between the first and the second object along the movement direction, the two scanning units having a defined offset.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.